Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: 1 Online-Ressource.

Language: Englisch

Bibliographic citation: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones ; volume:10 ; number:1 ; day:21 ; month:2 ; year:2024 ; pages:1-9 ; date:12.2024
Microsystems & nanoengineering ; 10, Heft 1 (21.2.2024), 1-9, 12.2024

Classification: Ingenieurwissenschaften und Maschinenbau

Creator: Pezone, Roberto
Anzinger, Sebastian
Baglioni, Gabriele
Wasisto, Hutomo Suryo
Sarro, Pasqualina M.
Steeneken, Peter
Vollebregt, Sten

Contributor: SpringerLink (Online service)

DOI: 10.1038/s41378-024-00656-x

URN: urn:nbn:de:101:1-2404291313552.509269259520

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 11:02 AM CEST

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Pezone, Roberto
Anzinger, Sebastian
Baglioni, Gabriele
Wasisto, Hutomo Suryo
Sarro, Pasqualina M.
Steeneken, Peter
Vollebregt, Sten
SpringerLink (Online service)

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Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

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Other Objects (12)

Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

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