Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
-
Englisch
- Bibliographic citation
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In: Plasma sources science and technology, 31, 11, Artikel 115004, S. 115004-1-115004-12
- Event
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Veröffentlichung
- (where)
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Bochum
- (who)
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Ruhr-Universität Bochum
- (when)
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2022
- Creator
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Vass, Máté
Wang, Li
Wilczek, Sebastian
Lafleur, Trevor
Brinkmann, Ralf Peter
Donkó, Zóltán
Schulze, Julian
- URN
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urn:nbn:de:hbz:294-108727
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
- 14.08.2025, 10:45 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Vass, Máté
- Wang, Li
- Wilczek, Sebastian
- Lafleur, Trevor
- Brinkmann, Ralf Peter
- Donkó, Zóltán
- Schulze, Julian
- Ruhr-Universität Bochum
Time of origin
- 2022
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Frequency
Fundamentals and Applications of energy-selective Ion Mass Spectrometry for the Analysis of low-pressure radio-frequency Plasmas
Low frequency fluid drift turbulence in magnetised plasmas
Electron heating modes and frequency coupling effects in dual-frequency capacitive CF 4 plasmas
Knowledge-based symmetry control of technological high-frequency plasmas
Electropositive core in electronegative magnetized capacitive radio frequency plasmas
Low frequency waves in plasmas with spatially varying electron temperature
Wave equations for low frequency waves in hot magnetically confined plasmas
Wave equations for low frequency waves in hot magnetically confined plasmas
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Frequency
Fundamentals and Applications of energy-selective Ion Mass Spectrometry for the Analysis of low-pressure radio-frequency Plasmas
Low frequency fluid drift turbulence in magnetised plasmas
Electron heating modes and frequency coupling effects in dual-frequency capacitive CF 4 plasmas
Knowledge-based symmetry control of technological high-frequency plasmas
Electropositive core in electronegative magnetized capacitive radio frequency plasmas
Low frequency waves in plasmas with spatially varying electron temperature
Wave equations for low frequency waves in hot magnetically confined plasmas
Wave equations for low frequency waves in hot magnetically confined plasmas
Wave equations for low frequency waves in hot magnetically confined plasmas
Efficiency scaling of inductively coupled plasmas for radio frequency propulsion systems
The flicker fusion frequency of budgerigars (Melopsittacus undulatus) revisited