Sound-Based Depth Estimation of Glass Microchannel in Laser-Induced Backside Wet Etching Using Wavelet Transform
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
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Sound-Based Depth Estimation of Glass Microchannel in Laser-Induced Backside Wet Etching Using Wavelet Transform ; day:8 ; month:2 ; year:2024 ; pages:1-16
International journal of precision engineering and manufacturing-green technology ; (8.2.2024), 1-16
- Creator
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Kim, Geun Young
Song, Dae-Seob
Kwon, Kui-Kam
Ahn, Sung-Hoon
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/s40684-023-00590-9
- URN
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urn:nbn:de:101:1-2404170746473.326065763897
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:53 AM CEST
Data provider
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Kim, Geun Young
- Song, Dae-Seob
- Kwon, Kui-Kam
- Ahn, Sung-Hoon
- SpringerLink (Online service)
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