- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Deutsch
- Notes
-
Bochum, Ruhr-Universität Bochum, Dissertation, 2011
- Keyword
-
Oxidation
Sensor
Vakuum
Paneel
Oxidschicht
Oxidation
Vakuummessung
Dünnschichtwiderstand
Sensor
Einwegprodukt
- Event
-
Veröffentlichung
- (where)
-
Bochum
- (who)
-
Ruhr-Universität Bochum
- (when)
-
2011
- Creator
- Contributor
-
Kunze, Ulrich
Doll, Theodor
Fakultät für Elektrotechnik und Informationstechnik
- URN
-
urn:nbn:de:hbz:294-31611
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:33 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Mäder, Sebastian
- Kunze, Ulrich
- Doll, Theodor
- Fakultät für Elektrotechnik und Informationstechnik
- Ruhr-Universität Bochum
Time of origin
- 2011
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