Influence of aberrations and roughness on the chromatic confocal signal based on experiments and wave-optical modeling
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Surface Topography: Metrology and Properties ; 8 (2020), 2. - ISSN 2051-672X. - eISSN 2051-672X
- Keyword
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Numerische Apertur
- Event
-
Veröffentlichung
- (where)
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Ulm
- (who)
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Universität Ulm
- (when)
-
2020
- Creator
-
Claus, Daniel
Nizami, Moaaz Rauf
- DOI
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10.18725/OPARU-46104
- URN
-
urn:nbn:de:bsz:289-oparu-46180-4
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
- 15.08.2025, 7:37 AM CEST
Data provider
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Associated
- Claus, Daniel
- Nizami, Moaaz Rauf
- Universität Ulm
Time of origin
- 2020
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