Thin films of copper oxide and copper grown by atomic layer deposition for applications in metallization systems of microelectronic devices
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
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9783941003170
- Dimensions
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21 cm
- Extent
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245 S.
- Language
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Englisch
- Notes
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Ill., graph. Darst.
Zugl.: Chemnitz, Techn. Univ., Diss., 2010
- Keyword
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Kupfer
Kupferoxide
Dünne Schicht
Atomlagenabscheidung
Metallisieren
Ameisensäure
Atomschichtepitaxie
Ausgangsmaterial
Diketonate
Galvanische Abscheidung
Kupfer
Kupferoxide
Metallisierungsschicht
Reduktion
Ruthenium
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 1:41 PM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Wächtler, Thomas
- Univ.-Verl.
Time of origin
- 2010
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