Process control in low pressure capacitive radio frequency plasmas based on kinetic simulations
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Bochum, Ruhr-Universität Bochum, Dissertation, 2023
- Keyword
-
Plasmadiagnostik
Niederdruckplasma
Plasmaätzen
Plasma
Plasmatechnik
Simulation
Magnetoplasma
Kapazität
- Event
-
Veröffentlichung
- (where)
-
Bochum
- (who)
-
Ruhr-Universität Bochum
- (when)
-
2024
- Creator
- Contributor
-
Schulze, Julian
Donko, Zoltan
Fakultät für Elektrotechnik und Informationstechnik
- URN
-
urn:nbn:de:hbz:294-108494
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:35 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Wang, Li
- Schulze, Julian
- Donko, Zoltan
- Fakultät für Elektrotechnik und Informationstechnik
- Ruhr-Universität Bochum
Time of origin
- 2024
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