Monografie
The role of metal catalysts during metal-assisted chemical etching of silicon
- Sprache
-
Englisch
- Identifier
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1246679272
Thema
Etching; Silicon; Nanowissenschaften; Nanotechnologie
- DOI
-
10.6094/UNIFR/222795
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
26.01.2023, 13:56 MEZ
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