Modelling nanomechanical effects in advanced lithographic materials and processes
- Alternative title
-
Modellierung nanomechanischer Effekte in neuen lithografischen Materialien und Prozessen
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Erlangen, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Dissertation, 2023
- Event
-
Veröffentlichung
- (where)
-
Erlangen
- (who)
-
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
- (when)
-
2023
- Creator
- Contributor
-
Erdmann, Andreas
Köstler, Harald
- DOI
-
10.25593/open-fau-62
- URN
-
urn:nbn:de:101:1-2024011906120563910257
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
- 2025-08-15T07:26:49+0200
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- D'Silva, Sean
- Erdmann, Andreas
- Köstler, Harald
- Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
Time of origin
- 2023
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