Investigation of LIG-based pressure sensors with various silicon-based elastomeric encapsulation layers

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: 1 Online-Ressource.

Language: Englisch

Bibliographic citation: Investigation of LIG-based pressure sensors with various silicon-based elastomeric encapsulation layers ; volume:11 ; number:1 ; day:27 ; month:9 ; year:2023 ; pages:1-8 ; date:12.2023
Micro and Nano Systems Letters ; 11, Heft 1 (27.9.2023), 1-8, 12.2023

Creator: Shin, Yoo-Kyum
Kim, Ki-Hoon
Seo, Min-Ho

Contributor: SpringerLink (Online service)

DOI: 10.1186/s40486-023-00176-9

URN: urn:nbn:de:101:1-2024013114472332733504

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 15.08.2025, 7:30 AM CEST

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Shin, Yoo-Kyum
Kim, Ki-Hoon
Seo, Min-Ho
SpringerLink (Online service)

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Investigation of LIG-based pressure sensors with various silicon-based elastomeric encapsulation layers

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