Self-organized submicron structures in photoresist films by UV-laser irradiation at water-confined conditions
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
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Self-organized submicron structures in photoresist films by UV-laser irradiation at water-confined conditions ; volume:129 ; number:9 ; day:14 ; month:8 ; year:2023 ; pages:1-10 ; date:9.2023
Applied physics / A. A, Materials science & processing ; 129, Heft 9 (14.8.2023), 1-10, 9.2023
- Creator
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Ehrhardt, Martin
Lai, Shengying
Lorenz, Pierre
Zajadacz, Joachim
Han, Bing
Zimmer, Klaus
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/s00339-023-06838-0
- URN
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urn:nbn:de:101:1-2023121311411878250510
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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15.08.2025, 7:39 AM CEST
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Associated
- Ehrhardt, Martin
- Lai, Shengying
- Lorenz, Pierre
- Zajadacz, Joachim
- Han, Bing
- Zimmer, Klaus
- SpringerLink (Online service)
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