Hochschulschrift
Lithography-free micro- and nanostructuring based conventional plasma etching
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
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Englisch
- Notes
-
Kassel, Univ., Diss., 2004
- Keyword
-
Mikrosystemtechnik
Plasmaätzen
Physik
- Creator
- URN
-
urn:nbn:de:hebis:34-1873
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:54 PM CET
Data provider
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Object type
- Hochschulschrift
Associated
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