Hochschulschrift
Multiscale Simulation of Metallic Copper and Copper Oxide Atomic Layer Deposition from Cu Beta-diketonates
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
Chemnitz, Technische Universität Chemnitz, Dissertation, 2017
- Klassifikation
-
Elektrotechnik, Elektronik
- Schlagwort
-
Leiterbahn
Atomlagenabscheidung
Kupferoxide
Kupfer
Diketonate
Ausgangsmaterial
Oberflächenchemie
Mehrskalenanalyse
Simulation
Atomlagenabscheidung
Oberflächenchemie
- Ereignis
-
Veröffentlichung
- (wo)
-
Chemnitz
- (wer)
-
Universitätsverlag der Technischen Universität Chemnitz
- (wann)
-
2018
- Ereignis
-
Veröffentlichung
- (wo)
-
Chemnitz
- (wer)
-
Technische Universität Chemnitz
- (wann)
-
2018
- Urheber
- Beteiligte Personen und Organisationen
-
Schulz, Stefan E.
Bartha, Johann W.
Elliott, Simon D.
- URN
-
urn:nbn:de:bsz:ch1-qucosa2-215390
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 11:01 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Objekttyp
- Hochschulschrift
Beteiligte
- Hu, Xiao
- Schulz, Stefan E.
- Bartha, Johann W.
- Elliott, Simon D.
- Universitätsverlag der Technischen Universität Chemnitz
- Technische Universität Chemnitz
Entstanden
- 2018
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