Hochschulschrift

Multiscale Simulation of Metallic Copper and Copper Oxide Atomic Layer Deposition from Cu Beta-diketonates

to related objects

Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Notes: Chemnitz, Technische Universität Chemnitz, Dissertation, 2017

Classification: Elektrotechnik, Elektronik

Keyword: Leiterbahn
Atomlagenabscheidung
Kupferoxide
Kupfer
Diketonate
Ausgangsmaterial
Oberflächenchemie
Mehrskalenanalyse
Simulation
Atomlagenabscheidung
Oberflächenchemie

Event: Veröffentlichung

(where): Chemnitz

(who): Universitätsverlag der Technischen Universität Chemnitz

(when): 2018

Event: Veröffentlichung

(where): Chemnitz

(who): Technische Universität Chemnitz

(when): 2018

Creator: Hu, Xiao

Contributor: Schulz, Stefan E.
Bartha, Johann W.
Elliott, Simon D.

URN: urn:nbn:de:bsz:ch1-qucosa2-215390

Rights: Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 11:01 AM CEST

Data provider

This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.

Show original at data provider

Object type

Hochschulschrift

Associated

Hu, Xiao
Schulz, Stefan E.
Bartha, Johann W.
Elliott, Simon D.
Universitätsverlag der Technischen Universität Chemnitz
Technische Universität Chemnitz

Time of origin

2018

Other Objects (12)

Deposition of metallic copper through UV light irradiation

Hochschulschrift

Multiscale simulation of metallic copper and copper oxide atomic layer deposition from Cu Beta-diketonates : = Multiskalensimulation der Atomlagenabschscheidung von metallischem Kupfer und Kupferoxid aus Cu Beta-Diketonate

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Copper atomic-scale transistors

Thin films of copper oxide and copper grown by atomic layer deposition for applications in metallization systems of microelectronic devices

Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

Atomic Layer Deposition of Copper Metal Films from Cu(acac) 2 and Hydroquinone Reductant

Synthesis of β‐Ketoiminato Copper (II) Complexes and Their Use in Copper Deposition

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

Nonlinear transport properties of atomic copper point contacts

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2

Color of Copper/Copper Oxide

Deposition of metallic copper through UV light irradiation

Hochschulschrift

Multiscale simulation of metallic copper and copper oxide atomic layer deposition from Cu Beta-diketonates : = Multiskalensimulation der Atomlagenabschscheidung von metallischem Kupfer und Kupferoxid aus Cu Beta-Diketonate

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Copper atomic-scale transistors

Thin films of copper oxide and copper grown by atomic layer deposition for applications in metallization systems of microelectronic devices

Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

Atomic Layer Deposition of Copper Metal Films from Cu(acac) 2 and Hydroquinone Reductant

Synthesis of β‐Ketoiminato Copper (II) Complexes and Their Use in Copper Deposition

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

Nonlinear transport properties of atomic copper point contacts

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2

Color of Copper/Copper Oxide

Deposition of metallic copper through UV light irradiation

Hochschulschrift

Multiscale simulation of metallic copper and copper oxide atomic layer deposition from Cu Beta-diketonates : = Multiskalensimulation der Atomlagenabschscheidung von metallischem Kupfer und Kupferoxid aus Cu Beta-Diketonate

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Copper atomic-scale transistors

Thin films of copper oxide and copper grown by atomic layer deposition for applications in metallization systems of microelectronic devices

Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

Atomic Layer Deposition of Copper Metal Films from Cu(acac) 2 and Hydroquinone Reductant

Synthesis of β‐Ketoiminato Copper (II) Complexes and Their Use in Copper Deposition

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

Nonlinear transport properties of atomic copper point contacts

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2

Color of Copper/Copper Oxide

Cultural heritage institutions wishing to register will find more information here.

Fields marked * need to be filled in.

Username*

Please enter your username

Email*

Please enter your email address

Please do not fill this field

First name

Last name

Password*

Please enter your password

Confirm password*

Please enter the same password

I have read the terms of use and the privacy policy for the collection of personal data and accept them. *

This field is required.

I would like to subscribe to the newsletter of the Deutsche Digitale Bibliothek. See newsletter subscription info.

Account created

Your "My DDB" account has been successfully created. Before you can log in to your account, you must click the confirmation link in the message we just sent to the email address you provided.

Multiscale Simulation of Metallic Copper and Copper Oxide Atomic Layer Deposition from Cu Beta-diketonates

Object Details

Classification and Topics

Contributors, Places and Time

Further information

Data provider

Object type

Associated

Time of origin

Other Objects (12)

Deposition of metallic copper through UV light irradiation

Multiscale simulation of metallic copper and copper oxide atomic layer deposition from Cu Beta-diketonates : = Multiskalensimulation der Atomlagenabschscheidung von metallischem Kupfer und Kupferoxid aus Cu Beta-Diketonate

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Copper atomic-scale transistors

Thin films of copper oxide and copper grown by atomic layer deposition for applications in metallization systems of microelectronic devices

Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

Atomic Layer Deposition of Copper Metal Films from Cu(acac) 2 and Hydroquinone Reductant

Synthesis of β‐Ketoiminato Copper (II) Complexes and Their Use in Copper Deposition

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

Nonlinear transport properties of atomic copper point contacts

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2

Color of Copper/Copper Oxide

Deposition of metallic copper through UV light irradiation

Multiscale simulation of metallic copper and copper oxide atomic layer deposition from Cu Beta-diketonates : = Multiskalensimulation der Atomlagenabschscheidung von metallischem Kupfer und Kupferoxid aus Cu Beta-Diketonate

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Copper atomic-scale transistors

Thin films of copper oxide and copper grown by atomic layer deposition for applications in metallization systems of microelectronic devices

Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

Atomic Layer Deposition of Copper Metal Films from Cu(acac) 2 and Hydroquinone Reductant

Synthesis of β‐Ketoiminato Copper (II) Complexes and Their Use in Copper Deposition

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

Nonlinear transport properties of atomic copper point contacts

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2

Color of Copper/Copper Oxide

Deposition of metallic copper through UV light irradiation

Multiscale simulation of metallic copper and copper oxide atomic layer deposition from Cu Beta-diketonates : = Multiskalensimulation der Atomlagenabschscheidung von metallischem Kupfer und Kupferoxid aus Cu Beta-Diketonate

Growth Monitoring of Ultrathin Copper and Copper Oxide Films Deposited by Atomic Layer Deposition

Copper atomic-scale transistors

Thin films of copper oxide and copper grown by atomic layer deposition for applications in metallization systems of microelectronic devices

Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

Atomic Layer Deposition of Copper Metal Films from Cu(acac) 2 and Hydroquinone Reductant

Synthesis of β‐Ketoiminato Copper (II) Complexes and Their Use in Copper Deposition

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

Nonlinear transport properties of atomic copper point contacts

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2

Color of Copper/Copper Oxide

Related objects

Reset password