- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Microelectronic Engineering 85 (2008), 2159-2163
- Keyword
-
CVD-Verfahren
Elektroniktechnologie
Verkupferung
- Event
-
Veröffentlichung
- (where)
-
Chemnitz, Chemnitz, Chemnitz, Chemnitz
- (who)
-
Universitätsbibliothek Chemnitz, Technische Universität Chemnitz, Air Products and Chemicals, Inc., Elsevier B.V.
- (when)
-
2008
- Creator
-
Norman, John A. T.
Perez, Melanie
Schulz, Stefan E.
Waechtler, Thomas
- URN
-
urn:nbn:de:bsz:ch1-200801346
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:49 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Norman, John A. T.
- Perez, Melanie
- Schulz, Stefan E.
- Waechtler, Thomas
- Universitätsbibliothek Chemnitz, Technische Universität Chemnitz, Air Products and Chemicals, Inc., Elsevier B.V.
Time of origin
- 2008
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