Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
1432-1858
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators ; day:6 ; month:9 ; year:2018 ; pages:1-11
Microsystem technologies ; (6.9.2018), 1-11
- Klassifikation
-
Ingenieurwissenschaften und Maschinenbau
- Urheber
-
Erbes, Andreja
- Beteiligte Personen und Organisationen
-
Wang, Wentao
Weinstein, Dana
Seshia, Ashwin A.
SpringerLink (Online service)
- DOI
-
10.1007/s00542-018-4118-5
- URN
-
urn:nbn:de:101:1-2018102419055443823741
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:33 MESZ
Datenpartner
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Beteiligte
- Erbes, Andreja
- Wang, Wentao
- Weinstein, Dana
- Seshia, Ashwin A.
- SpringerLink (Online service)
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