Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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In: Journal of micromechanics and microengineering(31, 2021), H. 5
- Event
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Veröffentlichung
- (where)
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Ilmenau
- (who)
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TU Ilmenau
- (when)
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2021
- Creator
- DOI
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10.1088/1361-6439/abf332
- URN
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urn:nbn:de:101:1-2022021506400316723301
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:50 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Behroudj, Arezo
- Salimitari, Parastoo
- Nilsen, Madeleine
- Strehle, Steffen
- TU Ilmenau
Time of origin
- 2021
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