Monografie
Theoretical and experimental studies related to the compositional and microstructural evolution of alumina thin films
- Sprache
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Englisch
- Anmerkungen
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Aachen, Techn. Hochsch.,, Diss., 2004
- Identifier
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973596732
Thema
Aluminiumoxide ; Schichtwachstum ; PVD-Verfahren ; Bogenplasma ; Hochschulschrift; Online-Publikation
Beteiligte Personen und Organisationen
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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26.01.2023, 13:53 MEZ
Objekttyp
- Monografie
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