Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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In: Lampouras, I.; Holz, M.; Strehle, S.; Körner, J.: Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride. In: Journal of Micromechanics and Microengineering 34 (2024), Nr. 1, 015005. DOI: https://doi.org/10.1088/1361-6439/ad0d80
- Event
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Veröffentlichung
- (where)
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Hannover
- (who)
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Gottfried Wilhelm Leibniz Universität Hannover
- (when)
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2023
- Event
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Veröffentlichung
- (where)
-
Hannover
- (who)
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Technische Informationsbibliothek (TIB)
- (when)
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2023
- Creator
- DOI
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10.15488/16934
- URN
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urn:nbn:de:101:1-2024041102323216264257
- Rights
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:54 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Lampouras, Ioannis
- Holz, Mathias
- Strehle, Steffen
- Körner, Julia
- Gottfried Wilhelm Leibniz Universität Hannover
- Technische Informationsbibliothek (TIB)
Time of origin
- 2023
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