Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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In: Japanese Journal of Applied Physics, Erscheinungsjahr: 2019, Jahrgang: 58, Seiten: SL0801-1-SL0801-7, E-ISSN: 1347-4065
- Event
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Veröffentlichung
- (where)
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Dresden
- (who)
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Technische Universität Dresden
- (when)
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2022
- Creator
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Schroeder, Uwe
Materano, Monica
Mittmann, Terence
Lomenzo, Patrick D.
Mikolajick, Thomas
Toriumi, Akira
- URN
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urn:nbn:de:bsz:14-qucosa2-820348
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:25 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Schroeder, Uwe
- Materano, Monica
- Mittmann, Terence
- Lomenzo, Patrick D.
- Mikolajick, Thomas
- Toriumi, Akira
- Technische Universität Dresden
Time of origin
- 2022
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