CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISBN: 9783540431435
3540431438

Dimensions: 24 cm

Extent: VIII, 142 S.

Language: Englisch

Notes: Ill., graph. Darst.
Literaturverz. S. 131 - 140

Keyword: Sensorsystem
CMOS
Kantilever
Gassensor

Event: Veröffentlichung

(where): Berlin, Heidelberg, New York, Barcelona, Hong Kong, London, Milan, Paris, Tokyo

(who): Springer

(when): 2002

Creator: Lange, Dirk
Brand, Oliver
Baltes, Henry

Table of contents: https://d-nb.info/964134217/04

Rights: Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.

Last update: 11.03.2025, 12:05 PM CET

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Associated

Lange, Dirk
Brand, Oliver
Baltes, Henry
Springer

Time of origin

2002

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CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications

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