Correlation of stress in silicon nitride layers with their complete removal by laser ablation
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Energy Procedia ; 38 (2013). - S. 707-712. - ISSN 1876-6102. - eISSN 1876-6102
- Classification
-
Industrielle und handwerkliche Fertigung
- Event
-
Veröffentlichung
- (where)
-
Konstanz
- (who)
-
Bibliothek der Universität Konstanz
- (when)
-
2013
- Contributor
-
Engelhardt, Josh
Ohl, Sibylle
Hahn, Giso
Terheiden, Barbara
- URN
-
urn:nbn:de:bsz:352-250241
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:44 PM CET
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Engelhardt, Josh
- Ohl, Sibylle
- Hahn, Giso
- Terheiden, Barbara
- Bibliothek der Universität Konstanz
Time of origin
- 2013
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