Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1543-186X
- Umfang
-
Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
online resource.
- Erschienen in
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Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon ; day:21 ; month:4 ; year:2021 ; pages:1-17
Journal of electronic materials ; (21.4.2021), 1-17
- Urheber
-
Dong, Hongqun
Tao, Xiaoma
Paulasto-Kröckel, Mervi
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
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10.1007/s11664-021-08861-4
- URN
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urn:nbn:de:101:1-2021060721582744675179
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:47 MESZ
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Beteiligte
- Dong, Hongqun
- Tao, Xiaoma
- Paulasto-Kröckel, Mervi
- SpringerLink (Online service)
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