Atmospheric pressure metal organic chemical vapor deposition of thin germanium films

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1573-4803
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Atmospheric pressure metal organic chemical vapor deposition of thin germanium films ; volume:56 ; number:15 ; day:16 ; month:2 ; year:2021 ; pages:9274-9286 ; date:5.2021
Journal of materials science ; 56, Heft 15 (16.2.2021), 9274-9286, 5.2021

Creator
Contributor
SpringerLink (Online service)

DOI
10.1007/s10853-021-05871-9
URN
urn:nbn:de:101:1-2021041522333140812290
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:58 AM CEST

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