Computer aided modeling for a miniature silicon-on-insulator MEMS piezoresistive pressure sensor
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2190-7439
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Computer aided modeling for a miniature silicon-on-insulator MEMS piezoresistive pressure sensor ; volume:5 ; number:3 ; day:11 ; month:4 ; year:2015 ; pages:202-210 ; date:9.2015
Photonic sensors ; 5, Heft 3 (11.4.2015), 202-210, 9.2015
- Creator
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Suja, K. J.
Komaragiri, Rama
- Contributor
-
SpringerLink (Online service)
- DOI
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10.1007/s13320-015-0239-y
- URN
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urn:nbn:de:101:1-2021080823061979466824
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:50 AM CEST
Data provider
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Associated
- Suja, K. J.
- Komaragiri, Rama
- SpringerLink (Online service)
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