Highly integrable silicon micropumps using lateral electrostatic bending actuators
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
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Highly integrable silicon micropumps using lateral electrostatic bending actuators ; day:9 ; month:4 ; year:2024 ; pages:1-12
Microsystem technologies ; (9.4.2024), 1-12
- Creator
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/s00542-024-05635-w
- URN
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urn:nbn:de:101:1-2406241208304.118203903068
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:50 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Uhlig, Sebastian
- Gaudet, Matthieu
- Langa, Sergiu
- Ruffert, Christine
- Jongmanns, Marcel
- Schenk, Harald
- SpringerLink (Online service)
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Design and characterization of a silicon MEMS microvalve for proportional flow control based on electrostatic bending actuators
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