Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2045-2322
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide ; volume:7 ; number:1 ; day:16 ; month:10 ; year:2017 ; pages:1-7 ; date:12.2017
Scientific reports ; 7, Heft 1 (16.10.2017), 1-7, 12.2017

Creator
Min Lee, Seung
Hwan Yum, Jung
Larsen, Eric S.
Chul Lee, Woo
Keun Kim, Seong
Bielawski, Christopher W.
Oh, Jungwoo
Contributor
SpringerLink (Online service)

DOI
10.1038/s41598-017-13693-6
URN
urn:nbn:de:101:1-2019102019412286967927
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:21 AM CEST

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Associated

  • Min Lee, Seung
  • Hwan Yum, Jung
  • Larsen, Eric S.
  • Chul Lee, Woo
  • Keun Kim, Seong
  • Bielawski, Christopher W.
  • Oh, Jungwoo
  • SpringerLink (Online service)

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