Acoustics on small scales : Modelling viscous effects in MEMS devices

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISSN: 1613-7620

Extent: Online-Ressource

Language: Englisch

Notes: online resource.

Bibliographic citation: Acoustics on small scales ; day:17 ; month:3 ; year:2021 ; pages:1-7
Elektrotechnik und Informationstechnik ; (17.3.2021), 1-7

Creator: Toth, Florian
Hassanpour Guilvaiee, Hamideh
Jank, Georg

Contributor: SpringerLink (Online service)

DOI: 10.1007/s00502-021-00875-4

URN: urn:nbn:de:101:1-2021050420373008541022

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 10:57 AM CEST

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Toth, Florian
Hassanpour Guilvaiee, Hamideh
Jank, Georg
SpringerLink (Online service)

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Acoustics on small scales : Modelling viscous effects in MEMS devices

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