Optimization of Pulse Laser Annealing to Increase Sharpness of Implanted-junction Rectifier in Semiconductor Heterostructure
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2150-5551
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
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Optimization of Pulse Laser Annealing to Increase Sharpness of Implanted-junction Rectifier in Semiconductor Heterostructure ; volume:2 ; number:4 ; day:12 ; month:12 ; year:2010 ; pages:256-267 ; date:12.2010
Nano-Micro letters ; 2, Heft 4 (12.12.2010), 256-267, 12.2010
- Creator
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Pankratov, E. L.
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/BF03353852
- URN
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urn:nbn:de:1111-2016052051611
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:44 AM CEST
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Associated
- Pankratov, E. L.
- SpringerLink (Online service)
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