Stealth dicing of sapphire wafers with near infra-red femtosecond pulses

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1432-0630
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Stealth dicing of sapphire wafers with near infra-red femtosecond pulses ; volume:123 ; number:5 ; day:25 ; month:4 ; year:2017 ; pages:1-7 ; date:5.2017
Applied physics / A. A, Materials science & processing ; 123, Heft 5 (25.4.2017), 1-7, 5.2017

Classification
Physik

Creator
Yadav, Amit
Contributor
Kbashi, Hani
Kolpakov, Stanislav
Gordon, Neil
Zhou, Kaiming
Rafailov, Edik U.
SpringerLink (Online service)

DOI
10.1007/s00339-017-0927-0
URN
urn:nbn:de:1111-201705078611
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:54 AM CEST

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Associated

  • Yadav, Amit
  • Kbashi, Hani
  • Kolpakov, Stanislav
  • Gordon, Neil
  • Zhou, Kaiming
  • Rafailov, Edik U.
  • SpringerLink (Online service)

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