Hochschulschrift
Mechanical properties of thick polycrystalline silicon films suitable for surface micromachining
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783826565946
3826565940
- Dimensions
-
21 cm
- Extent
-
II, 117 S.
- Edition
-
Als Ms. gedr.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Zugl.: Duisburg, Univ., Diss., 1999
- Keyword
-
Sensor
Mikromechanik
Silicium
Polykristall
Dickschichttechnik
LPCVD-Verfahren
- Event
-
Veröffentlichung
- (where)
-
Aachen
- (who)
-
Shaker
- (when)
-
1999
- Creator
-
Fürtsch, Matthias
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 1:41 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Fürtsch, Matthias
- Shaker
Time of origin
- 1999
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Failure analysis of polycrystalline silicon-based photovoltaic modules considering the effects of residual stresses and mechanical loading
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Nanoscale investigation of deformation characteristics in a polycrystalline silicon carbide
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