Hochschulschrift
Mechanical properties of thick polycrystalline silicon films suitable for surface micromachining
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783826565946
3826565940
- Maße
-
21 cm
- Umfang
-
II, 117 S.
- Ausgabe
-
Als Ms. gedr.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Zugl.: Duisburg, Univ., Diss., 1999
- Schlagwort
-
Sensor
Mikromechanik
Silicium
Polykristall
Dickschichttechnik
LPCVD-Verfahren
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
-
Shaker
- (wann)
-
1999
- Urheber
-
Fürtsch, Matthias
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.06.2025, 13:41 MESZ
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Objekttyp
- Hochschulschrift
Beteiligte
- Fürtsch, Matthias
- Shaker
Entstanden
- 1999
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