Hochschulschrift
High energy boron implantation into different silicon substrates
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783932749193
3932749197
- Dimensions
-
21 cm
- Extent
-
VIII, 158 S.
- Edition
-
1. Aufl.
- Language
-
Englisch
- Notes
-
graph. Darst.
Zugl.: München, Techn. Univ., Diss., 1998
- Bibliographic citation
-
Selected topics of semiconductor physics and technology ; Vol. 19
- Event
-
Veröffentlichung
- (where)
-
München
- (who)
-
Walter-Schottky-Inst.
- (when)
-
1998
- Creator
-
Pech, Reiner
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 2:03 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Pech, Reiner
- Walter-Schottky-Inst.
Time of origin
- 1998
Other Objects (12)
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Defect Engineering for Enhanced Silicon Radiofrequency Substrates
Boron Removal Effect in p-type Silicon Sensors
Lifetime degradation mechanism in boron-doped Czochralski silicon
Printable boron dopant sources for silicon solar cells
X-ray scattering from silicon surfaces and thin oxides on silicon substrates
Ni/Al multilayer reactions on nanostructured silicon substrates
Ni/Al multilayer reactions on nanostructured silicon substrates
Electrochemically deposited gallium oxide nanostructures on silicon substrates
Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
Structural chemistry of Boron and Silicon
Structural chemistry of boron and silicon
Avoiding boron-oxygen related degradation in highly boron doped Cz silicon
Defect Engineering for Enhanced Silicon Radiofrequency Substrates
Boron Removal Effect in p-type Silicon Sensors
Lifetime degradation mechanism in boron-doped Czochralski silicon
Printable boron dopant sources for silicon solar cells
X-ray scattering from silicon surfaces and thin oxides on silicon substrates
Ni/Al multilayer reactions on nanostructured silicon substrates
Ni/Al multilayer reactions on nanostructured silicon substrates
Electrochemically deposited gallium oxide nanostructures on silicon substrates
Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
Structural chemistry of Boron and Silicon
Structural chemistry of boron and silicon
Avoiding boron-oxygen related degradation in highly boron doped Cz silicon
Defect Engineering for Enhanced Silicon Radiofrequency Substrates
Boron Removal Effect in p-type Silicon Sensors
Lifetime degradation mechanism in boron-doped Czochralski silicon
Printable boron dopant sources for silicon solar cells
X-ray scattering from silicon surfaces and thin oxides on silicon substrates
Ni/Al multilayer reactions on nanostructured silicon substrates
Ni/Al multilayer reactions on nanostructured silicon substrates