Chemical Solution Deposition of Ferroelectric Hafnium Oxide for Future Lead Free Ferroelectric Devices
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: ECS journal of solid state science and technology 4(12), Seiten/Artikel-Nr.:P419-P423
- Klassifikation
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Physik
- Ereignis
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Veröffentlichung
- (wo)
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Aachen
- (wer)
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Universitätsbibliothek der RWTH Aachen
- (wann)
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2015
- Urheber
-
Starschich, Sergej
Griesche, David
Schneller, Theodor
Böttger, Ulrich
- DOI
-
10.1149/2.0061512jss
- URN
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urn:nbn:de:101:1-201804202814
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
- 14.08.2025, 10:45 MESZ
Datenpartner
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Beteiligte
- Starschich, Sergej
- Griesche, David
- Schneller, Theodor
- Böttger, Ulrich
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2015
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