Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Erschienen in
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Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates ; volume:4 ; pages:726-731
Beilstein journal of nanotechnology ; 4, 726-731
- Klassifikation
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Ingenieurwissenschaften und Maschinenbau
- DOI
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10.3762/bjnano.4.82
- URN
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urn:nbn:de:101:1-2014052313281
- Rechteinformation
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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14.08.2025, 10:45 MESZ
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