- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783527316984
- Maße
-
25 cm
- Umfang
-
X, 479 S.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Literaturangaben
- Erschienen in
-
Advanced micro & nanosystems ; Vol. 7
- Klassifikation
-
Ingenieurwissenschaften und Maschinenbau
- Schlagwort
-
LIGA-Verfahren
- Ereignis
-
Veröffentlichung
- (wo)
-
Weinheim
- (wer)
-
Wiley-VCH-Verl.
- (wann)
-
2009
- Beteiligte Personen und Organisationen
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.06.2025, 13:45 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Saile, Volker
- Wiley-VCH-Verl.
Entstanden
- 2009
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