Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2520-8128
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication ; volume:5 ; number:2 ; day:26 ; month:4 ; year:2022 ; pages:179-187 ; date:6.2022
Nanomanufacturing and metrology ; 5, Heft 2 (26.4.2022), 179-187, 6.2022
- Urheber
-
Deng, Xiao
Tan, Wen
Tang, Zhaohui
Lin, Zichao
Cheng, Xinbin
Li, Tongbao
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1007/s41871-022-00140-y
- URN
-
urn:nbn:de:101:1-2022081920492302508830
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:28 MESZ
Datenpartner
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Beteiligte
- Deng, Xiao
- Tan, Wen
- Tang, Zhaohui
- Lin, Zichao
- Cheng, Xinbin
- Li, Tongbao
- SpringerLink (Online service)
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