Selective surface modification of lithographic silicon oxide nanostructures by organofunctional silanes

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource

Bibliographic citation
Selective surface modification of lithographic silicon oxide nanostructures by organofunctional silanes ; volume:4 ; pages:218-226
Beilstein journal of nanotechnology ; 4, 218-226

Classification
Ingenieurwissenschaften und Maschinenbau

DOI
10.3762/bjnano.4.22
URN
urn:nbn:de:101:1-2013062610797
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 11:02 AM CEST

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