Room temperature deposition of highly dense TiO2 thin films by Filtered Cathodic Vacuum Arc
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
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In: Proceedings of SPIE. SPIE, 2015
- Ereignis
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Veröffentlichung
- (wo)
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Dresden
- (wer)
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Helmholtz-Zentrum Dresden-Rossendorf
- (wann)
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2019
- Urheber
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Guillen, E.
Heras, I.
Rincon Llorente, G.
Lungwitz, F.
Alcon-Camas, M.
Escobar-Galindo, R.
- URN
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urn:nbn:de:bsz:d120-qucosa2-339296
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:45 MEZ
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Beteiligte
- Guillen, E.
- Heras, I.
- Rincon Llorente, G.
- Lungwitz, F.
- Alcon-Camas, M.
- Escobar-Galindo, R.
- Helmholtz-Zentrum Dresden-Rossendorf
Entstanden
- 2019
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