Integrated acoustic resonators in commercial fin field-effect transistor technology

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISSN: 2520-1131

Extent: Online-Ressource

Language: Englisch

Notes: online resource.

Bibliographic citation: Integrated acoustic resonators in commercial fin field-effect transistor technology ; volume:5 ; number:9 ; day:23 ; month:9 ; year:2022 ; pages:611-619 ; date:9.2022
Nature electronics ; 5, Heft 9 (23.9.2022), 611-619, 9.2022

Classification: Elektrotechnik, Elektronik

Creator: Anderson, Jackson
He, Yanbo
Bahr, Bichoy
Weinstein, Dana

Contributor: SpringerLink (Online service)

DOI: 10.1038/s41928-022-00827-6

URN: urn:nbn:de:101:1-2022121220595433296723

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 15.08.2025, 7:37 AM CEST

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Anderson, Jackson
He, Yanbo
Bahr, Bichoy
Weinstein, Dana
SpringerLink (Online service)

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Integrated acoustic resonators in commercial fin field-effect transistor technology

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