3D passive microfluidic valves in silicon and glass using grayscale lithography and reactive ion etching transfer
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource, 12 Seiten
- Language
-
Englisch
- Bibliographic citation
-
In: Microfluidics and nanofluidics(27), H. 8 - ISSN 1613-4990
In: Springer, Heidelberg
- Event
-
Veröffentlichung
- (where)
-
Ilmenau
- (who)
-
TU Ilmenau
- (when)
-
2023
- Creator
- DOI
-
10.1007/s10404-023-02663-2
- URN
-
urn:nbn:de:101:1-2409230309565.487223824282
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:51 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Phi, Hai Binh
- Bohm, Sebastian
- Runge, Erich
- Dittrich, Lars
- Strehle, Steffen
- TU Ilmenau
Time of origin
- 2023
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