A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices ; volume:16 ; number:1 ; day:26 ; month:1 ; year:2021 ; pages:1-21 ; date:12.2021
Nanoscale research letters ; 16, Heft 1 (26.1.2021), 1-21, 12.2021

Creator
Algamili, Abdullah Saleh
Khir, Mohd Haris Md
Dennis, John Ojur
Ahmed, Abdelaziz Yousif
Alabsi, Sami Sultan
Ba Hashwan, Saeed Salem
Junaid, Mohammed M.
Contributor
SpringerLink (Online service)

DOI
10.1186/s11671-021-03481-7
URN
urn:nbn:de:101:1-2021031718341019652775
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:35 AM CEST

Data provider

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Associated

  • Algamili, Abdullah Saleh
  • Khir, Mohd Haris Md
  • Dennis, John Ojur
  • Ahmed, Abdelaziz Yousif
  • Alabsi, Sami Sultan
  • Ba Hashwan, Saeed Salem
  • Junaid, Mohammed M.
  • SpringerLink (Online service)

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