Polycrystalline silicon PhC cavities for CMOS on-chip integration

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2045-2322
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Polycrystalline silicon PhC cavities for CMOS on-chip integration ; volume:12 ; number:1 ; day:12 ; month:10 ; year:2022 ; pages:1-11 ; date:12.2022
Scientific reports ; 12, Heft 1 (12.10.2022), 1-11, 12.2022

Classification
Elektrotechnik, Elektronik

Creator
Iadanza, S.
Devarapu, G. C. R.
Blake, A.
Alba, P. Acosta
Pedini, J.-M
O’Faolain, L.
Contributor
SpringerLink (Online service)

DOI
10.1038/s41598-022-21578-6
URN
urn:nbn:de:101:1-2022122921041077663574
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:34 AM CEST

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Associated

  • Iadanza, S.
  • Devarapu, G. C. R.
  • Blake, A.
  • Alba, P. Acosta
  • Pedini, J.-M
  • O’Faolain, L.
  • SpringerLink (Online service)

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