Bias-plasma Assisted RF Magnetron Sputter Deposition of Hydrogen-less Amorphous Silicon
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
-
Englisch
- Bibliographic citation
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In: Energy Procedia ; 84 (2015). - S. 105-109. - eISSN 1876-6102
- Classification
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Physik
- Event
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Veröffentlichung
- (where)
-
Konstanz
- (who)
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Bibliothek der Universität Konstanz
- (when)
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2016
- Creator
- URN
-
urn:nbn:de:bsz:352-0-327966
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:48 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Gerke, Sebastian
- Hahn, Giso
- Job, Reinhart
- Terheiden, Barbara
- Bibliothek der Universität Konstanz
Time of origin
- 2016
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