Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe ; volume:6 ; number:1 ; day:2 ; month:9 ; year:2011 ; pages:1-7 ; date:12.2011
Nanoscale research letters ; 6, Heft 1 (2.9.2011), 1-7, 12.2011

Creator
Jiang, Xiaohong
Wu, Guoyun
Zhou, Jingfang
Wang, Shujie
Tseng, Ampere A.
Du, Zuliang
Contributor
SpringerLink (Online service)

DOI
10.1186/1556-276X-6-518
URN
urn:nbn:de:101:1-2021081510144980648312
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:51 AM CEST

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Associated

  • Jiang, Xiaohong
  • Wu, Guoyun
  • Zhou, Jingfang
  • Wang, Shujie
  • Tseng, Ampere A.
  • Du, Zuliang
  • SpringerLink (Online service)

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