- Sprache
-
Englisch
- Anmerkungen
-
Cottbus, Brandenburgische Technische Universität Cottbus, Diss., 2010
- Identifier
-
1015526845
- Thema
-
Atomlagenabscheidung; Hochschulschrift
- Beteiligte Personen und Organisationen
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
26.01.2023, 13:57 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Objekttyp
- Monografie
Beteiligte
- Karavaev, Konstantin
- Schmeißer, Dieter
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