- Sprache
-
Englisch
- Umfang
-
VI, 276 S.
- ISBN
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978-3-540-21862-3
- Identifier
-
972375066
- Reihe
-
Advances in polymer science; Vol. 172
Thema
Lithografie ; Photoresist ; Molekulares Prägen
Beteiligte Personen und Organisationen
Itō, Hiroshi
- Inhaltsverzeichnis
- Rechteinformation
-
Der Zugriff auf Teile des Objekts ist unbeschränkt möglich.
- Letzte Aktualisierung
-
16.08.2023, 18:30 MESZ
Objekttyp
- Monografie
Beteiligte
- Itō, Hiroshi
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