Hochschulschrift
Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
Augsburg, Univ., Diss., 2007
- Klassifikation
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Elektrotechnik, Elektronik
- Schlagwort
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MEMS ; Hochfrequenz ; Akustischer Sensor
- Urheber
- URN
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urn:nbn:de:bvb:384-opus-6401
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:42 MEZ
Datenpartner
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Objekttyp
- Hochschulschrift
Beteiligte
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