Surface and subsurface characterisation in micro-milling of monocrystalline silicon
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1433-3015
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
-
Surface and subsurface characterisation in micro-milling of monocrystalline silicon ; volume:81 ; number:5-8 ; day:21 ; month:5 ; year:2015 ; pages:1319-1331 ; date:11.2015
The international journal of advanced manufacturing technology ; 81, Heft 5-8 (21.5.2015), 1319-1331, 11.2015
- Creator
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Huo, Dehong
Lin, Chao
Choong, Zi Jie
Pancholi, Ketan
Degenaar, Patrick
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/s00170-015-7308-7
- URN
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urn:nbn:de:101:1-2021081321342567524924
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 11:02 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Huo, Dehong
- Lin, Chao
- Choong, Zi Jie
- Pancholi, Ketan
- Degenaar, Patrick
- SpringerLink (Online service)
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