Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: AIP advances, 11, 7, Artikel 075024, S. 075024-1-075024-14
- Event
-
Veröffentlichung
- (where)
-
Bochum
- (who)
-
Ruhr-Universität Bochum
- (when)
-
2021
- Creator
-
Masheyeva, Ranna U.
Dzhumagulova, Karlygash N.
Myrzaly, Murat
Schulze, Felix Julian
Donko, Zoltan
- URN
-
urn:nbn:de:hbz:294-87970
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:55 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Masheyeva, Ranna U.
- Dzhumagulova, Karlygash N.
- Myrzaly, Murat
- Schulze, Felix Julian
- Donko, Zoltan
- Ruhr-Universität Bochum
Time of origin
- 2021
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